[16p-S4_203-1~9] 7.2 Applications and technologies of electron beams

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[16p-S4_203-7] Development of Tomographic Field Ion Microscope Assisted by Object Detection Model

Jiayu Li¹, Takumi Seko¹, Tatsuo Iwata¹, 〇Shigekazu Nagai¹ (1.Mie Univ.)

Keywords:

field ion microscope,field electron sources

The characteristics of field emission electron sources strongly depend on the atomic structure of the cathode surface. In this study, we developed a tomographic field ion microscope based on automatic atomic position detection using YOLO. Three-dimensional reconstruction was applied to atomic coordinates extracted from He-FIM images, successfully reproducing interplanar spacings consistent with theoretical values and clear periodic structures for a W<110> tip. This method is effective for high-precision analysis of atomic arrangements.