[16p-S4_203-1~9] 7.2 Applications and technologies of electron beams

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[16p-S4_203-9] Estimation of the emitter tip curvature radius in TiN coated volcano-structured field emitter array

〇Yusuke Kawasaki¹, Hidekazu Murata¹, Hiromasa Murata², Masayoshi Nagao² (1.Meijo Univ., 2.AIST)

Keywords:

field emitter array,electron optical instrument for evaluation of multi emitters,TiN coating

In a previous study, we reported on the current evaluation of the emitter tip in the field emitter array. In this study, we obtained the FN plot for the emitter tip. We then accurately modeled the emitter of the volcano-structured field emitter array and performed a simulation analysis of the electric field at the emitter tip using the boundary charge method to calculate the tip curvature radius.