[16p-W8E_101-1~15] 13.7 Compound and power devices, process technology and characterization

1:30 PM - 2:15 PM JST(4:30 AM - 5:15 AM UTC)

[16p-W8E_101-1] [The 26th Outstanding Achievement Award Speech] Semiconductor Superjunction - How the Idea Came About

〇Tatsuhiko Fujihira¹ (1.Fuji Electric)

Keywords:

semiconductor,superjunction,specific on-resistance

Superjunction reduced the specific on-resistance of Si power MOSFET to as low as 7.4% of the Si limit and its market reached USD 3.3 billion in 2024. The idea of superjunction to reduce the specific on-resistance of power MOSFET came about to the author during the development of HVIC (High Voltage Integrated Circuit), not power MOSFET, and during the investigation of the cause of the defect in HVIC. It will be reported how the idea of semiconductor superjunction came about at that time.