Presentation Information

[16p-W8E_101-7]Effects of pre-deposition hydrogen annealing and sacrificial oxidation on SiO2/SiC structures

〇(B)Shoto Sawada1, Takuma Kobayashi1, Hiroki Fujimoto1, Masahiro Hara1, Heiji Watanabe1 (1.U Osaka)

Keywords:

SiO2/SiC Interfaces