[16p-W9_222-1~11] Lab to Fab 2: Bridging Semiconductor Research with Scalable and Sustainable Manufacturing

4:25 PM - 5:00 PM JST(7:25 AM - 8:00 AM UTC)

[16p-W9_222-8] Chemical Industry's Contribution to Greening Semiconductor Manufacturing: Waste Acid Recycling Business

〇Kenta Takahashi¹ (1.Shimonoseki Mitsui Chemicals, Inc.)

Keywords:

semiconductor,waste acid,recycle

In the semiconductor manufacturing process, chemicals containing acids such as phosphoric acid, hydrofluoric acid, and sulfuric acid are used, but the waste acids after use are often disposed of as industrial waste or landfilled. Therefore, as an approach from the chemical industry to green semiconductor manufacturing, we will introduce a waste acid recycling business that utilizes chemical recycling technology.