The 73rd JSAP Spring Meeting 2026
Advanced Search

Session Details

Symposium (Oral)Symposium : Lab to Fab 2: Bridging Semiconductor Research with Scalable and Sustainable Manufacturing

[16p-W9_222-1~11]Lab to Fab 2: Bridging Semiconductor Research with Scalable and Sustainable Manufacturing

Mon. Mar 16, 2026 1:30 PM - 6:00 PM JST
Mon. Mar 16, 2026 4:30 AM - 9:00 AM UTC
W9_222 (West Bldg. 9)
1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[16p-W9_222-1]Opening Remark

〇Toshiyuki Mitsue1 (1.Deloitte Tohmatsu)
1:40 PM - 2:15 PM JST(4:40 AM - 5:15 AM UTC)

[16p-W9_222-2]The Future of Semiconductor Factories Brought About by Digitalization: AI and Smart Factories

〇Takayasu Ueno1 (1.KIOXIA Corp.)
2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-W9_222-3]Verification of Reusability in a Multi-Step Annealing Model of ALD-SiO2 Using Physics-Based Intermediate Variables

〇Ryosuke Okachi1, Masanori Usui1, Junya Muramatsu1, Makoto Kuwahara1, Daigo Kikuta1 (1.Toyota Central R&D Labs., Inc.)
2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[16p-W9_222-4]Prediction of Si3N4 Wet Etching Amount Under Single Concentration and Temperature Condition Using Gaussian Process Regression with a Small Dataset

〇(M1)Yusuke Hirata1, Koki Shibata1, Naoko Misawa1, Takashi Ota2, Yuki Yoshinaga2, Chihiro Matsui1, Ken Takeuchi1 (1.Univ. Tokyo, 2.SCREEN Semiconductor Solutions Co., Ltd.)
2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[16p-W9_222-5]Prediction of SiO2/Si3N4 Wet Etching Amount Under Various Etchant Conditions Using Gaussian Process Regression

〇(M1)Yusuke Hirata1, Naoko Misawa1, Takashi Ota2, Yuki Yoshinaga2, Chihiro Matsui1, Ken Takeuchi1 (1.Univ. Tokyo, 2.SCREEN Semiconductor Solutions Co., Ltd.)
3:00 PM - 3:35 PM JST(6:00 AM - 6:35 AM UTC)

[16p-W9_222-6]Delivering High-Quality Chips at Rapid Speed: The Future of Chip Design with Rapidus DMCO/Raads

〇Koki Tsurusaki1 (1.Rapidus Corporation)
3:50 PM - 4:25 PM JST(6:50 AM - 7:25 AM UTC)

[16p-W9_222-7]Enhancing semiconductor manufacturing technology through Process Informatics

〇Masaki Takaishi1 (1.Aixtal)
4:25 PM - 5:00 PM JST(7:25 AM - 8:00 AM UTC)

[16p-W9_222-8]Chemical Industry's Contribution to Greening Semiconductor Manufacturing: Waste Acid Recycling Business

〇Kenta Takahashi1 (1.Shimonoseki Mitsui Chemicals, Inc.)
5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-W9_222-9]Operational Control of a High-speed Switching Valve Enabling Sustainable On-demand Precursor Delivery for ALD

〇(M1)Kanta Isida1, Hiroshi Nishizato1,2, Shota Oda1, Yugo Nakaya2, Kinichi Nasu4, Hiroshi Okajima3, Takeshi Momose4 (1.GSST, Kumamoto Univ., 2.HORIBA STEC, 3.FAST, Kumamoto Univ., 4.SE, Kumamoto Univ.)
5:15 PM - 5:50 PM JST(8:15 AM - 8:50 AM UTC)

[16p-W9_222-10]Innovation in Wet Processes and Ecosystem Building for Green Semiconductor Manufacturing

〇Hiroki Miyajima1, Shinichi Nakagawa1 (1.Screen)
5:50 PM - 6:00 PM JST(8:50 AM - 9:00 AM UTC)

[16p-W9_222-11]Redefining Dialogue: Where Lab Meets Fab

〇Hiroyuki AKINAGA1 (1.Hokkaido Univ.)
Back to Category List