[16p-W9_323-1~16] 13.2 Exploratory Materials, Physical Properties, Devices

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[16p-W9_323-10] Nanocrystalline Mg2Si Thin Films Deposited by High-Power Impulse Magnetron Co-Sputtering Using Segmented Mg-Si Target

〇Daito Tanaka¹, Hyuga Kobayashi¹, Hiroharu Sugawara¹, Yuya Takahashi¹, Eitetsu Shimizu¹, Tatsuro Hanajiri², Keiichi Yanagisawa², Fumitaka Sakamoto² (1.SD, Tokyo Metro U., 2.Toyo Univ.)

Keywords:

HiPIMS,Mg2Si,nanocrystalline