Presentation Information

[16p-W9_323-9]Mg2Si PD Linear Array Fabrication and SWIR Imaging Demonstration

〇Yuki Iino1, Hideto Takei1, Yuya Tachimura1, Hiroki Yamaguchi1, Shunya Sakane1, Takayuki Kimura1, Haruhiko Udono1 (1.Ibaraki Univ.)

Keywords:

Mg2Si,SWIR,Image Sensors

We developed a 32-pixel Mg2Si photodiode linear array (PDLA) for low-cost SWIR sensors. The device was fabricated by forming pn junctions via Ag-diffusion into n-type substrates. Using a custom readout circuit and a 1310 nm light source, we successfully captured SWIR images with high contrast and no pixel defects. This demonstrates that Mg2Si-based PDLAs possess practical imaging performance.