The 73rd JSAP Spring Meeting 2026
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Sun. Mar 15, 2026
Mon. Mar 16, 2026
Tue. Mar 17, 2026
Wed. Mar 18, 2026
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6:15 PM - 6:30 PM JST
(9:15 AM - 9:30 AM UTC)
[16p-W9_324-17]
Evaluation of dissolution behavior of β-Ga
2
O
3
for isotropic etching
〇Aoi Otsuka
1
, Taro Tsukada
1
, Toshinori Taishi
1
(1.Shinshu Univ.)
Keywords:
gallium oxide,etching
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