[16p-WL2_101-1~11] 6.4 Thin films and New materials

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-WL2_101-3] Self-formation of atomically flat step-terrace structures in SrRuO₃ thin films grown on non-pretreated SrTiO₃(100) substrates

〇(M2)Ryotaro Arakawa¹, Sachio Komori¹, Masaaki Tanaka², Tomoyasu Taniyama¹ (1.Nagoya Univ., 2.Nagoya Inst. Tech.)

Keywords:

oxide,perovskite,magnet

We investigated the self-formation mechanism of step-terrace structures in SrRuO3 thin films grown on as-received SrTiO3 (100) substrates. Using pulsed laser deposition with an Nd:YAG laser and a 3D mask to suppress particulates, we evaluated the surface morphology under various growth conditions. Deposition at 675 C for 1 h resulted in rough island growth, whereas longer deposition or higher temperature produced flat step-terrace structures. These results suggest that initial island growth and increased adatom diffusion length contribute to the self-flattening process.