[17a-M_278-1~13] CS.3 Code-sharing Session of 6.1 & 13.3 & 13.5

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[17a-M_278-1] Orientation dependencies of ferroelectric and piezoelectric properties in CeO₂-HfO₂ thick films

〇Shunshi Imamura¹, Kazuki Okamoto¹, Yukari Inoue², Hiroshi Funakubo¹ (1.Science Tokyo, 2.TDK Corp.)

Keywords:

ferroelectric,Hafnium oxide,PLD method