[17a-M_278-1~13] CS.3 Code-sharing Session of 6.1 & 13.3 & 13.5

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)

[17a-M_278-13] Local C–V Mapping Observation of Electric-Field-Cycling-Induced Changes in HfO₂-Based Ferroelectric Capacitors

〇Yoshiomi Hiranaga¹, Yuki Itoya², Masaharu Kobayashi² (1.Tohoku Univ. RIEC, 2.Univ. Tokyo IIS)

Keywords:

ferroelectrics,scanning probe microscopy,hafnium oxide

In this talk, we evaluate changes in local switching characteristics of Hf_0.5Zr_0.5O₂ thin films induced by electric field cycling using a local C–V mapping technique, and discuss the origins of wake-up and polarization fatigue from the perspective of nanoscale domain dynamics.