Presentation Information

[17a-M_278-2]PLD growth of ferroelectric hafnia under Ar-O2 mixed gas atmosphere

〇Rintaro Maki1, Yufan Shen1, Sota Fuji1, Daisuke Kan2, Yuichi Shimakawa1 (1.Kyoto Univ., 2.Univ. of Osaka)

Keywords:

ferroelectric,hafnia