[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-1] Mechanical Tolerance Evaluation of Gold Single-Axis MEMS Accelerometer by Long-Term Vibration Testing

〇Torauto Yamada¹, Chihaya Mukaide¹, Tomoyuki Kurioka¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Science Tokyo)

Keywords:

MEMS acclerometer,Long-Term Vibration Testing,Resonant Frequency

This paper describes the results of durability evaluation through long-term vibration testing for the social implementation of a high-sensitivity single-axis gold proof-mass MEMS accelerometer. The evaluation is conducted under the condition of vibrations in the living environment, using a vibration frequency of 100 Hz and acceleration as parameters:0 to 2.00 g (1 g = 9.8 m/s²). Vibration testing is conducted 10⁷ times as a guideline for mechanical metal fatigue evaluation, and the rate of change in resonance frequency before and after testing is examined. The measurement results indicate that the change rate of the resonance frequency is within 3%, and no deterioration is observed. Therefore, these results confirm that the single-axis gold proof-mass MEMS accelerometer can be structurally stable without mechanical metal fatigue.