[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology | The 73rd JSAP Spring Meeting 2026

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Oral presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[17a-S2_201-1~13]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 17, 2026 9:00 AM - 12:45 PM JST
Tue. Mar 17, 2026 12:00 AM - 3:45 AM UTC

S2_201 (South Bldg. 2)

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-1]Mechanical Tolerance Evaluation of Gold Single-Axis MEMS Accelerometer by Long-Term Vibration Testing

〇Torauto Yamada¹, Chihaya Mukaide¹, Tomoyuki Kurioka¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Science Tokyo)

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-2]Evaluation of Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer

〇Chihaya Mukaide¹, Torauto Yamada¹, Tomoyuki Kurioka¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tho-Fu Mark Chang¹, Yoshihiro Miyake¹, Masato Sone¹, Hiroyuki Ito¹ (1.Science Tokyo)

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-3]Fabrication of Au/Nylon Composite Fibers via Supercritical CO₂-Assisted Catalyzation

〇(M1)RONGWEI XU¹, Takumi Suda¹, Tomoyuki Kurioka¹, Wan-Ting Chiu¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Katsunari Sato², Nao Yoshida², Hiromichi Kurosu², Masato Sone¹ (1.Science Tokyo, 2.NWU)

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-4]Evaluation of the Influences of Ti/Au Thickness on Spring Constants of Ti/Au-Multi-Layered Serpentine Springs

〇Hisashi Takahata¹, Tomoyuki Kurioka¹, Torauto Yamada¹, Chihaya Mukaide¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Yoshihiro Miyake¹, Hiroyuki Ito¹, Masato Sone¹ (1.Science Tokyo)

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-5]Effect of Annealing on Mechanical Properties of Electroplated Gold Films on Ti Plate

〇Nobutaka Toake¹, Tomoyuki Kurioka¹, Shota Iima¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Hiroyuki Ito¹, Yoshihiro Miyake¹, Masato Sone¹ (1.Science Tokyo)

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-6]Evaluation of Structures and Device Characteristics of Single-axis MEMS capacitive Accelerometer with Gold Circular Proof-mass

〇Masako Okumura¹, Tomoyuki Kurioka¹, Torauto Yamada¹, Tatsuhiko Mori¹, Chihaya Mukaide¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Yoshihiro Miyake¹, Hiroyuki Ito¹, Katsuyuki Machida¹, Masato Sone¹ (1.Science Tokyo)

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[17a-S2_201-7]Substrate-Dependent Ruthenium Electrodeposition for Interconnect Applications

〇(D)Zhitao Hu¹, Kurioka Tomoyuki¹, Yung-Jung Hsu^1,2, Tso-Fu Mark Chang¹, Katsuyuki Machida¹, Hiroyuki Ito¹, Miyake Yoshihiro¹, Masato Sone¹ (1.Science Tokyo, 2.NYCU)

11:00 AM - 11:30 AM JST(2:00 AM - 2:30 AM UTC)

[17a-S2_201-8][The 47th Paper Award Speech] Ge-on-Insulator Fabrication based on Ge-on-Nothing Technology

〇Keisuke Yamamoto^1,2, Dong Wang², Roger Loo^3,4, Clement Porret³, Jinyoun Cho⁵, Kristof Dessein⁵, Valerie Depauw³ (1.Kumamoto Univ., 2.Kyushu Univ., 3.imec, 4.Ghent Univ., 5.Umicore)

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)English Presentation

[17a-S2_201-9][The 47th Young Scientist Award Speech] Formation and contact resistivity of Sc germanosilicides on Si_1-xGe_x:B

〇Bert Pollefliet^1,2, Clement Porret², Jean-Luc Everaert², Kiroubanand Sankaran², Olivier Richard², Thierry Conard², Han Han², Anja Vanleenhove², Roger Loo^2,3, Christophe Detavernier³, Andre Vantomme¹, Clement Merckling^1,2 (1.KU Leuven, 2.imec, 3.Ghent Univ.)

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[17a-S2_201-10]Impact of CF₄/H₂ Plasma Exposure on Surface Reactions of Si and Si_0.7Ge_0.3

〇(M1)Ibuki Saburi¹, Kotaro Ozaki¹, Yuki Imai¹, Takayoshi Tsutsumi², Kenji Ishikawa², Yuji Yamamoto^3,1, Wei-Chen Wen³, Katsunori Makihara^1,3 (1.Nagoya Univ. Eng., 2.Nagoya Univ. cLPS, 3.Leibniz Institute for High Performance Microelectronics)

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[17a-S2_201-11]Dry Etching of Epitaxially Grown Si0.7Ge0.3 Using HBr Plasma

〇Sota Ishii¹, Kotaro Ozaki², Eita Yano¹, Ibuki Saburi², Yuki Imai¹, Takayoshi Tsutsumi³, Kenji Ishikawa³, Yuji Yamamoto^4,2, Wei-Chen Wen⁴, Katsunori Makihara^2,4 (1.Nagoya Univ, 2.Nagoya Univ. Eng, 3.Nagoya Univ. cLPS, 4.IHP)

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)

[17a-S2_201-12]Ni-thickness Dependence of Ultrathin a-Si/Ni/SOI Structures on Silicidation Reaction

〇Syogo Adachi¹, Yuki Imai¹, Takumi Washioka¹, Noriyuki Taoka³, Katsunori Makihara^1,2 (1.Nagoya Univ. Eng., 2.IHP, 3.Aichi Inst. Tech. Eng.)

12:30 PM - 12:45 PM JST(3:30 AM - 3:45 AM UTC)

[17a-S2_201-13]Impact of Annealing Temperature for Ultrathin Si/Ni/Si Stacked Layers
on Silicidation Reactions

〇Takumi Washioka¹, Yuki Imai¹, Shogo Adachi¹, Ibuki Saburi¹, Noriyuki Taoka², Kotaro Ozaki¹, Katsunori Makihara^1,3 (1.Nagoya Univ. Eng., 2.Aichi Inst. Tech. Eng., 3.IHP)

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