Presentation Information
[17a-S2_201-12]Ni-thickness Dependence of Ultrathin a-Si/Ni/SOI Structures on Silicidation Reaction
〇Syogo Adachi1, Yuki Imai1, Takumi Washioka1, Noriyuki Taoka3, Katsunori Makihara1,2 (1.Nagoya Univ. Eng., 2.IHP, 3.Aichi Inst. Tech. Eng.)
Keywords:
Silicidation,Ultrathin
