[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-2] Evaluation of Detection Characteristics in Wide Range Gold Proof-Mass Single-Axis MEMS Capacitive Accelerometer

〇Chihaya Mukaide¹, Torauto Yamada¹, Tomoyuki Kurioka¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tho-Fu Mark Chang¹, Yoshihiro Miyake¹, Masato Sone¹, Hiroyuki Ito¹ (1.Science Tokyo)

Keywords:

MEMS accelerometer,wide range,detection range

This paper describes the detection range evaluation results of a proposed highly sensitive, wide-range, single-axis MEMS accelerometer with two gold proof-masses for the early prediction of Parkinson's disease. Capacitance-vibration experiments verify the acceleration detection ranges of each proof-mass, clearly demonstrating that the low-g (1g=9.8 m/s²) proof-mass has a detection range from μg to 0.5g, while the high-g proof-mass has a detection range from 0.5g to 6g. Furthermore, after module implementation of this device, muscle sound and gait motion measurements are performed. Therefore, it is confirmed that the proposed device can measure the detection range from muscle sounds to gait movements due to the wide detection range from micro-g to 6 g.