[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-4] Evaluation of the Influences of Ti/Au Thickness on Spring Constants of Ti/Au-Multi-Layered Serpentine Springs

〇Hisashi Takahata¹, Tomoyuki Kurioka¹, Torauto Yamada¹, Chihaya Mukaide¹, Katsuyuki Machida¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Yoshihiro Miyake¹, Hiroyuki Ito¹, Masato Sone¹ (1.Science Tokyo)

Keywords:

spring constant,serpentine spring,MEMS

This paper reports the influence of the thicknesses of Ti and Au layers on the spring constant of Ti/Au multi-layered serpentine springs. The spring constant is evaluated by carrying out finite element analyses for model structures composed of a proof-mass connected four serpentine springs. The results show that their spring constants increase with the increase in the Ti layer thickness. Their spring constants also increase with the increase in Au layer thickness under the same thickness of Ti layer. These results are due to the increase in the stiffness of the serpentine spring structures caused by increasing the thickness of Ti and Au layers.