[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-S2_201-6] Evaluation of Structures and Device Characteristics of Single-axis MEMS capacitive Accelerometer with Gold Circular Proof-mass

〇Masako Okumura¹, Tomoyuki Kurioka¹, Torauto Yamada¹, Tatsuhiko Mori¹, Chihaya Mukaide¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Yoshihiro Miyake¹, Hiroyuki Ito¹, Katsuyuki Machida¹, Masato Sone¹ (1.Science Tokyo)

Keywords:

Circular,Warpage,MEMS

In this study, we propose a circular proof-mass structure to suppress warping deformation caused by the different in thermal expansion coefficients between Ti and Au in a MEMS capacitive accelerometer with a Ti/Au multi-layered structure. The warping behavior of the circular proof-mass of the fabricated MEMS capacitive accelerometer is evaluated. Its warpage is suppressed to less than 1% of its radius. The capacitance-voltage (C-V) measurements are conducted to evaluate the fabricated device characteristics. It is confirmed that the pull-in at approximately 3.2V and its stable C-V response suppress warping deformation of the proof-mass, resulting in a stable device structure.