[17a-S2_201-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:30 AM JST(2:00 AM - 2:30 AM UTC)

[17a-S2_201-8] [The 47th Paper Award Speech] Ge-on-Insulator Fabrication based on Ge-on-Nothing Technology

〇Keisuke Yamamoto^1,2, Dong Wang², Roger Loo^3,4, Clement Porret³, Jinyoun Cho⁵, Kristof Dessein⁵, Valerie Depauw³ (1.Kumamoto Univ., 2.Kyushu Univ., 3.imec, 4.Ghent Univ., 5.Umicore)

Keywords:

Germanium,Ge-on-Insulator,wafer bonding