Presentation Information

[17a-S4_202-1]Investigation into High-Speed Control of Optical-Fiber Matrix Exposure

〇Toshiyuki Horiuchi1, Yuta Suzuki1, Jun-ya Iwasaki1, Akira Yanagida1, Hiroshi Kobayashi1 (1.Tokyo Denki Univ.)

Keywords:

optical fiber,matrix exposure,high-speed exposure

It is required to print rough patterns with widths or sizes of 50-500 μm simply and inexpensively. Such patterns are used for 2dimensional code marks and others. To answer the request, a new technology using an optical fiber matrix composed of squared fibers is under development. Each fiber is connected to an LED, and the original bright and dark patterns are formed by lighting designated fiber ends. The bright and dark patterns are projected on the resist coated on an exposed object. Thus, resist patterns are obtained after developing the exposed object. The diameter of optical fibers has been refined from 1 mm to 500, 250, and 125 μm step by step. In this paper, it was investigated whether the exposure time was reduced to several tens milliseconds and high-speed exposure was enabled. It was verified that aimed high-speed exposure was feasible by controlling the lightening of LED under the powerful electric current condition using a micro controller and bipolar transistor.