[17a-W9_324-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[17a-W9_324-8] Conductivity Modulation of Cu Thin Films by Mist-CVD and Solution Structure

〇Tatsuki Okada¹, Ryousuke Ohashi¹, Kei Mizumoto¹, Htet Su WAI¹, Mondal Abhay Kumar¹, Toshiyuki Kawaharamura^1,2 (1.Kochi Univ. Technology, 2.Res.Inst)

Keywords:

copper,mistCVD