Presentation Information
[17p-M_B07-5]In Situ TEM Observation during Semiconductor Processing and Device Operation: Application to Solid-Phase Crystallization
〇Manabu Tezura1, Takanori Asano1, Riichiro Takaishi1, Mitsuhiro Tomita1, Masumi Saitoh1, Hiroki Tanaka1 (1.Frontier Technology R&D Inst.)
Keywords:
in situ,TEM,EELS
