Presentation Information
[17p-M_B07-6]Advancement of Temperature Evaluation Techniques for Nanoscale Devices
〇Ken Uchida1 (1.Univ. Tokyo)
Keywords:
evaluation of operation tepmerature of nanoscaled devices,modified pulsed IV method,molecular thermometer
Self-heating during operation significantly affects the electrical characteristics and reliability of nanoscale MOSFETs and nanostructured devices. In this presentation, we review methods for directly measuring channel temperature during operation by combining the four-terminal gate resistance technique with the AC conductance method, and report the development of a modified pulsed I–V technique that enables electrical characterization under conditions where temperature rise is negligible. In addition, nanoscale temperature distribution measurement using molecular thermometry is introduced, and recent progress in operating-temperature measurement techniques for advanced devices is overviewed.