[17p-M_B07-1~10] Frontiers of Semiconductor Characterization Techniques

4:30 PM - 4:50 PM JST(7:30 AM - 7:50 AM UTC)

[17p-M_B07-8] Advanced 4D-XPS Data Analysis Platform for Precise Reconstruction of Depth Profilesvia Integrated Deep Learning and Statistical Approaches

〇Satoshi Toyoda¹, Masaki Ando², Atsushi Ogura^2,3, Toyohiko Kinoshita¹, Masatake Machida¹ (1.Vacuum Products, 2.Meiji University, 3.MREL)

Keywords:

Buried interface analysis,AR-XPS,4D-XPS

Visualization of buried interfaces in multilayer semiconductor films is crucial for next-generation device development. We advanced a 4D-XPS analysis platform that incorporates spatiotemporal information into AR-XPS to address low signal-to-noise ratios inherent in short-time measurements. By integrating unsupervised deep-learning-based denoising with statistical approaches, the proposed framework enables accurate reconstruction of depth-resolved elemental distributions from large-scale datasets under practical experimental constraints.