[17p-M_B07-1~10] Frontiers of Semiconductor Characterization Techniques

4:50 PM - 5:15 PM JST(7:50 AM - 8:15 AM UTC)

[17p-M_B07-9] Analysis of dopant atom arrangements using quantum beam holography

〇Tomohiro Matsushita¹ (1.NAIST)

Keywords:

semiconductor,diamond,atomic resolution holography

Quantum-beam–based atomic-resolution holography is a technique that does not require a periodic atomic arrangement and enables the determination of atomic configurations around a specific element, making it well suited for analyzing dopants in crystals. Variants of this method include photoelectron holography, X-ray fluorescence holography, and neutron holography. In particular, photoelectron holography allows site-selective separation of atomic positions by exploiting the valence dependence of core-level states. We apply this approach to observe local atomic structures in a wide variety of systems, such as dopants in diamond and interfaces of dielectric films.