Presentation Information
[17p-PA6-14]Study on the application of Photoluminescence (PL) imaging technique
for failure analysis of communication laser diodes
〇Shinya Honda1, Tomoyuki Uchida1, Ryuichi Sugie1 (1.Toray Research Center Inc.)
Keywords:
laser diode,photoluminescence,failure analysis
We examined the application of the PL imaging method to failure analysis of communication laser diodes (LDs). Since LDs have a multilayer structure, delivering excitation light to the target layer and eliminating reflected light are major challenges. In this study, we used a near-infrared LD device and acquired PL images from the backside after exposing the InP substrate. As a result, we confirmed that inducing emission from the InP substrate and subsequently exciting the active layer could be a useful approach for LD defect analysis. Future work will focus on optimizing excitation wavelengths and related conditions.