Presentation Information
[17p-PB3-13]Time-evolution measurement of laser-induced fluorescence in the deposition region for neutral Ti particles produced by high power pulsed magnetron sputtering
〇Yuki Nakagawa1, Akito Sawa1, Hiroki Kobayasi1, Eisuke Yokoyama1,2, Masaomi Sanekata1, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Tokyo Polytech. Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)
Keywords:
laser-induced fluorescence,high power impulse magnetron sputtering
In recent years, high power impulse magnetron sputtering (HiPIMS) has been developed that could supply high power by reducing the duty cycle in high power pulsed magnetron sputtering (HPPMS). However, the deposition rate is slow due to the small duty cycle. To overcome the shortcomings, a new method has been devised to increase the deposition rate by using multi-pulse.
In this study, we designed HiPIMS and various multi-pulse HPPMS [multi-pulse HiPIMS (m-HiPIMS), intermittent deep oscillation magnetron sputtering (i-DOMS)] using modulated pulse power supply, then time-evolution measurement that were carried out for laser-induced fluorescence (LIF) of sputtered neutral Ti particles in the deposition region.
In this study, we designed HiPIMS and various multi-pulse HPPMS [multi-pulse HiPIMS (m-HiPIMS), intermittent deep oscillation magnetron sputtering (i-DOMS)] using modulated pulse power supply, then time-evolution measurement that were carried out for laser-induced fluorescence (LIF) of sputtered neutral Ti particles in the deposition region.