Session Details

[17p-PB3-1~13]8.1 Plasma production and diagnostics

Tue. Mar 17, 2026 4:30 PM - 6:00 PM JST
Tue. Mar 17, 2026 7:30 AM - 9:00 AM UTC
PB3 (Martial Arts Hall (B1F))

[17p-PB3-2]Analysis of the Electric Field Distribution in High-Frequency Current Root Canal Therapy

〇(M2)Yunpeng Chang1, Tomioka Satoshi1, Yamauchi Yuji1, Matsumoto Yutaka1, Higashi Naoki1, Sugaya Tsutomu2 (1.Faculty of Eng.Hokkaido Univ., 2.Faculty of Dent. Med.Hokkaido Univ.)

[17p-PB3-5]Observation of Channel Formation in Multi-Electrode Dielectric Barrier Discharge

〇Hirotake Taguchi1, Yukito Nakano1, Mahiro Aoki1, Osamu Sakai1 (1.Univ. of Shiga Pref.)

[17p-PB3-6]Local control of electron density in VHF radio frequency plasmas using metamaterials

〇Yukito Nakano1, Hirotake Taguchi1, Osamu Sakai1 (1.Univ. of Shiga Pref.)

[17p-PB3-7]Evaluation
of electron energy distribution function near a cusp point in RF magnetic
nozzle type thruster

〇(M1)Kanta Kagawa1, Ito Mitsuki1, Nakamoto Satoshi1, Hurukawa Takeru1, Takeno Hiromasa1 (1.Kobe University)

[17p-PB3-8]Evaluation of Double Curling Probe Method with the Same Diameter Probes

〇TSUBASA UGA1, Kousei Ozawa1, Keiji Nakamura1, Daisuke Ogawa1 (1.Chubu Univ.)

[17p-PB3-9]Pressure Dependence of Plasma Structure Evaluated by Three-Dimensional Reconstruction from Multi-vie Emission Images

〇Hayato Yoshikawa1, Ryota Izumi1, Haruka Suzuki1,2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)

[17p-PB3-10]Comparison of Analytical and Non-parametric Inversion Approaches for EEPFs in Ar ICP based on OES and CRM

〇Yuchen Ye1, Kenta Doi2, Tetsuji Kiyota2, Wataru Kikuchi1, Wentao He1, Kazuki Shimatani1, Hinata Hanyu1, Yuya Yamashita1, Atsushi Nezu1, Hiroshi Akatsuka1 (1.Institute of Science Tokyo, 2.ULVAC,Inc.)

[17p-PB3-11]Influence of residence time on gas utilization efficiency
in Ar/CH4 plasma for DLC films deposition

〇(M1)Yu Uematsu1, Hiroyuki Kousaka2, Akinori Oda1 (1.Chiba Tech, 2.Gifu Univ.)

[17p-PB3-12]Analysis of ionization-ratio characteristics of sputtered particles produced in multi-pulse sputtering by plasma optical emission spectroscopy

〇Eisuke Yokoyama1,2, Yuki Nakagawa2, Hiroki Kobayashi2, Masaomi Sanekata2, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Salesian Polytech., 2.Tokyo Polytech. Univ., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

[17p-PB3-13]Time-evolution measurement of laser-induced fluorescence in the deposition region for neutral Ti particles produced by high power pulsed magnetron sputtering

〇Yuki Nakagawa1, Akito Sawa1, Hiroki Kobayasi1, Eisuke Yokoyama1,2, Masaomi Sanekata1, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Tokyo Polytech. Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)