Presentation Information
[17p-PB3-9]Pressure Dependence of Plasma Structure Evaluated by Three-Dimensional Reconstruction from Multi-vie Emission Images
〇Hayato Yoshikawa1, Ryota Izumi1, Haruka Suzuki1,2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, Nagoya Univ., 3.NIFS)
Keywords:
Plasma,Reconstruction
As plasma processes become increasingly sophisticated, diagnostic techniques for non-contact assessment of plasma spatial structures are becoming more important. In this study, a non-invasive method for reconstructing the three-dimensional structure of plasma emission using multi-view image analysis based on tomographic techniques is applied. Focusing on capacitively coupled plasma, experiments are conducted under near-uniform spatial conditions while varying the gas pressure, and the reconstructed emission distributions and low-emission regions formed near the electrodes are examined.