Presentation Information
[17p-S2_203-2]Latest Trends in Next-Generation Electron Sources for Electron Microscopy
〇Toshiaki Kusunoki1, Noriaki Arai2 (1.Hitachi Ltd., 2.Hitachi High-Tech)
Keywords:
Electron Microscopy,Electron Sources
In high-resolution field emission electron microscopy (FE-SEM), an electron source with good monochromaticity is required to increase the spatial resolution. It is effective to use a low-work function material that can emit electrons at a lower electric field. Therefore, the development of field emission electron sources for hexaborides such as LaB6 and CeB6 and transition metals carbides such as HfC is being developed.
In this talk, we will introduce the electron emission characteristics of the cold field emission electron source of HfC and the evaluation of the work function.
In this talk, we will introduce the electron emission characteristics of the cold field emission electron source of HfC and the evaluation of the work function.