[17p-S2_203-1~11] Next-generation electron sources and new developments in electron beam technology

3:50 PM - 4:20 PM JST(6:50 AM - 7:20 AM UTC)

[17p-S2_203-6] Development of Semiconductor Photocathodes and New Horizons in Electron Beam Technology: "How about a pulsed electron source?"

〇Atsushi Koizumi¹ (1.Photo electron Soul)

Keywords:

photocathode,electron gun,InGaN

As semiconductor devices adopt increasingly complex 3D architectures, advanced electron beam inspection is becoming essential. The practical use of nitride semiconductor photocathodes has overcome key challenges in miniaturization and durability, opening the door to new applications that exploit their pulsed electron source capabilities. This talk will highlight recent progress in photocathode development and its impact on next-generation inspection and measurement technologies.