Presentation Information

[17p-W2_401-12]Fabrication and Characterization of NW Schottky Barrier Diodes using GaN Nanowires Selectively Grown by RF-MBE

〇Masaya Sekiguchi1, Kousei Hikosaka1, Zyunnichi Motohisa1 (1.RCIQE Hokkaido Univ.)

Keywords:

GaN,eptaxial growth,schottky barrier diodes

Schottky barrier diodes (SBDs) were fabricated using GaN nanowires formed by selective-area growth via RF molecular beam epitaxy (RF-MBE). For comparison, SBDs were also fabricated on planar GaN grown by RF-MBE as well as on conventional n-GaN epitaxial samples, and their current–voltage (I–V) characteristics were systematically compared.