Presentation Information

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[17p-W2_401-14]Nondestructive Detection of Threading Dislocations with a-Type Burgers Vector Components in GaN Crystals by Phase-Contrast Microscopy

〇Yukari Ishikawa¹, Hattori Ryo², Yongzhao Yao^1,3, Daiki Katsube¹, Koji Sato¹ (1.JFCC, 2.CF, 3.Mie Univ.)

Keywords:

phase contrast microscopy,GaN,dislocation

We demonstrated, through a one-to-one correspondence with multiphoton photoluminescence contrast, that threading dislocations possessing an a-component of the Burgers vector in GaN(001) crystals can be detected by phase-contrast microscopy. In addition to dislocations, surface scratches, voids, and facet boundaries were also detected. Furthermore, by varying the focal depth during observation, the three-dimensional distribution of threading dislocations was successfully obtained.

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