Presentation Information

[17p-W2_401-8]Influence of Graphene/SiC(0001) Substrate Surface Morphology on the Crystallinity of Nitride Thin Films

〇Hodaka Hamamoto1, Keisuke Takemoto1, Yusuke Zushi1, Kohei Ueno2, Hiroshi Fujioka2 (1.Nissan Motor Co., 2.Univ. of Tokyo)

Keywords:

pulsed sputtering deposition,2D material,nitride thin films