Presentation Information
[18a-PA3-12]Growth of ZnO on Glass and Sapphire Substrates via Mist CVD
〇(B)Takato Imae1, Arifumi Okada1 (1.Kyoto Inst. Tech)
Keywords:
Mist CVD,Zinc Oxide,Surface morphology
In this study, we prepared ZnO films on glass and sapphire c-plane surfaces via mist-CVD and investigated the effect of the substrate on crystallinity, morphology, and properties of the grown films. Fused-silica glass and polished sapphire c-plane substrates were placed in a fused-silica tubular furnace. A zinc acetate aqueous solution was prepared and atomized. The mist was carried into the fused-silica tube using oxygen carrier gas. Surface morphology was observed via atomic force microscopy and the film crystallinity was evaluated via X-ray diffraction, the optical bandgap was evaluated via UV-vis spectroscopy. Both sample surfaces were covered with grains with about 200 nm diameter. However, XRD patterns of the samples were different each other. Particularly, the (002) diffraction peak of ZnO on sapphire was selectively intense, suggesting the substrate crystal structure affected the ZnO crystallinity.