[18a-PA3-1~39] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18a-PA3-37] Impact of Si Substrate Crystal Orientation on SnO Sputter Deposition
and TFT Characteristics

〇Yoshikazu Shin¹, Ishii Kazuho¹, Aikawa Shinya¹ (1.Kougakuin Univ.)

Keywords:

SnO,p type oxide semiconductor,layered structure