Presentation Information

[18a-PB4-5]Formation of SiC on Si Substrates via Hydrogen-Methane Microwave Plasma Irradiation and NEXAFS Analysis

〇(B)Souta Muroya1, Hiroki Kitahara1, Daichi Ogura1, Tetsuya Sato1, Shin-ichi Motoyama2 (1.Univ. of Yamanashi, 2.Miyatsu Co., LTD)

Keywords:

Plasma