[18a-PB4-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-PB4-7] Synthesis of carbon-based thin film using slot antenna method by liquid plasma CVD

〇Kaito Hashiguchi¹, Tatsuo Ishijima¹, Yusuke Nakano¹, Yasunori Tanaka¹ (1.Kanazawa Univ.)

Keywords:

Liquid plasma,Carbon-based thin film,plasma CVD

We are investigating the high-speed and large-area growth of carbon-based thin films, including diamond films, using a microwave-assisted in-bubble plasma CVD method in a slot antenna configuration. In this report, to investigate the effect of the mixing ratio of the organic solvent used on film morphology, a methanol (MeOH)-ethanol (EtOH) mixed solution was employed as the carbon source. The film quality was evaluated by Raman spectroscopy when the mixing ratio was varied.