Presentation Information
[18a-PB4-7]Synthesis of carbon-based thin film using slot antenna method by liquid plasma CVD
〇Kaito Hashiguchi1, Tatsuo Ishijima1, Yusuke Nakano1, Yasunori Tanaka1 (1.Kanazawa Univ.)
Keywords:
Liquid plasma,Carbon-based thin film,plasma CVD
We are investigating the high-speed and large-area growth of carbon-based thin films, including diamond films, using a microwave-assisted in-bubble plasma CVD method in a slot antenna configuration. In this report, to investigate the effect of the mixing ratio of the organic solvent used on film morphology, a methanol (MeOH)-ethanol (EtOH) mixed solution was employed as the carbon source. The film quality was evaluated by Raman spectroscopy when the mixing ratio was varied.