[18a-PB4-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-PB4-9] Effect of Dielectric Nozzle Diameter on Electric Field Distribution and Plasma Generation Characteristics in a Microwave Atmospheric Pressure Plasma Jet

〇Hiroki Nagamori¹, Bat-Orgil Erdenezaya¹, Tatsuo Ishijima¹, Yusuke Nakano¹, Yasunori Tanaka¹ (1.Kanazawa Univ.)

Keywords:

Y2O3 Film Deposition,Plasma Jet,Atmospheric Pressure Plasma

Using the Microwave Atmospheric Pressure Plasma Jet (MW-APPJ), we have successfully deposited Y₂O₃ films with a thickness of approximately 1 µm and a diameter of 1.5 mm. To achieve large-area deposition, it is necessary to expand the plasma onto the substrate. This paper analyzes the effect of different dielectric nozzle diameters on the electric field distribution at the nozzle tip using electromagnetic field simulation. Based on the relationship with plasma ignition characteristics observed in plasma generation experiments, we investigated the appropriate nozzle diameter.