Presentation Information
[18a-S2_204-3]Development of a Methodology for Rapid Identification of Optimal Deposition Conditions in Supercritical Fluid Deposition (1)
〇(B)Seitaro Sanai1, Shota Oda2, Takeshi Hashishin3, Ichiro Akai4, Takeshi Momose5 (1.FE, Kumamoto Univ., 2.GSST, Kumamoto Univ., 3.FAST, Kumamoto Univ., 4.IINA, Kumamoto Univ., 5.SE, Kumamoto Univ.)
Keywords:
process informatic,physics-informed bayesian optimization,supercritical fluid deposition
This study proposes a strategy to apply informatics technologies—which have recently become a major trend in technological development—by decomposing the causal structure and applying them locally, while further incorporating physical information. For thin-film deposition processes, where only a limited amount of experimental data is typically available, this approach ensures extrapolative capability and interpretability, and enables the construction of a generalized process model that decouples geometric size dependence.
