[18a-S2_204-1~6] 23.1 Joint Session N "Informatics"

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-S2_204-4] Development of a Methodology for Rapid Identification of Optimal Deposition Conditions
in Supercritical Fluid Deposition (2)

〇Shota Oda¹, Seitaro Sanai², Takeshi Hashishin³, Ichiro Akai⁴, Takeshi Momose⁵ (1.GSST, Kumamoto Univ., 2.FE, Kumamoto Univ., 3.FAST, Kumamoto Univ., 4.IINA, Kumamoto Univ., 5.SE, Kumamoto Univ)

Keywords:

Process informatics,Physics-informed bayesian optimization,Supercritical fluid deposition

Aiming at high-speed and uniform thin-film deposition using supercritical fluid deposition, this study develops a process modeling framework that integrates data-driven methods with experimental science, moving beyond conventional trial-and-error-based development. The proposed approach enables the estimation of optimal process conditions from a limited number of experiments.