Presentation Information

[18a-W2_401-1]Surface diffusion length of Ga adatoms estimated from composition and step-height of AlGaN layers grown by metalorganic vapor-phase epitaxy on misoriented GaN (0001) substrates

〇Kazuhiro Mochizuki1, Tomoyoshi Mishima1, Fumimasa Horikiri1, Hiroshi Ohta1, Tomoaki Nishimura1 (1.Hosei Univ.)

Keywords:

gallium nitride,surface diffusion,adatom