Presentation Information
[18a-W2_401-6]Fabrication and characterization of Al doped β-Nb2N films grown on AlN by sputtering
〇Yuki Kato1, Takayuki Harada2, Hideto Miyake3, Kazuhisa Ikeda1, Atsushi Kobayashi1 (1.Tokyo Univ. of Science, 2.NIMS, 3.Mie Univ.)
Keywords:
superconductor
