Presentation Information
[18a-W2_401-7]Epitaxial growth of NbNx thin films on GaN by sputtering
〇Takeru Kodama1, Yuki Kato2, Kazuhisa Ikeda1,2, Atsushi Kobayashi1,2 (1.Tokyo Univ. of Science, 2.Grad. School of Tokyo Univ. of Science)
Keywords:
superconductor,NbN
