[18p-M_103-1~7] 8.1 Plasma production and diagnostics

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-M_103-1] Microwave Magnetic Field Excitation for Plasma Generation

〇Hanae Yoshida¹, Satoshi Fujii¹ (1.NIT,Okinawa Collage)

Keywords:

microwave plasma,microwave,TM110 Mode Cavity Resonator

Microwave-excited plasmas are applied to various processes due to their high-efficiency energy supply capability. Recently, a technique directly exciting Mg metal vapor using a microwave magnetic field mode has been reported, and its application to processes such as oxide reduction is advancing. This study focused on Zn, which exhibits high vapor pressure at lower temperatures. Using a magnetic field mode cavity resonator, we confirmed that Zn plasma can be generated at approximately 300°C. We also demonstrated that the emission intensity increases with the input power. Based on these results, we propose a novel method for generating metal vapor plasma using microwave magnetic field excitation.