[18p-M_103-1~7] 8.1 Plasma production and diagnostics | The 73rd JSAP Spring Meeting 2026

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Oral presentation8 Plasma Electronics : 8.1 Plasma production and diagnostics

[18p-M_103-1~7]8.1 Plasma production and diagnostics

Wed. Mar 18, 2026 2:00 PM - 3:45 PM JST
Wed. Mar 18, 2026 5:00 AM - 6:45 AM UTC

M_103 (Main Bldg.)

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-M_103-1]Microwave Magnetic Field Excitation for Plasma Generation

〇Hanae Yoshida¹, Satoshi Fujii¹ (1.NIT,Okinawa Collage)

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[18p-M_103-2]Diagnostics of CF₄/O₂ Capacitively Coupled Plasma Using Tomographic Emission Spectroscopy

〇(M1)Masato Yoshii¹, Kenta Doi², Tetsuji Kiyota², Yuchen Ye¹, Wentao He¹, Hiroshi Akatsuka¹ (1.Science Tokyo, 2.ULVAC)

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[18p-M_103-3]Measurement of Sheath Electric Field Distribution using Fluorescent Spherical Microparticles

T.X. Wang¹, Daisuke Hiro¹, Kousuke Takahashi¹, 〇Masahiko Inoue¹, Toshihiro Taguchi², Yasuhisa Oda¹, S.W. Park¹ (1.Setsunan Univ., 2.JAEA)

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[18p-M_103-4]Measurement of the Ion Energy Distribution at the High-Frequency Electrode
in a Dual-Frequency Capacitively Coupled Ar Plasma

〇(M1)Kodai Fujitani¹, Dohan Kim¹, Masayoshi Naito¹, Haruka Suzuki¹, Shuichi Kuboi², Hiroyuki Fukumizu², Kazuaki Kurihara², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.KIOXIA Corp.)

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[18p-M_103-5]Energy-resolved time-evolution measurement using time-of-flight mass spectrometry in the deposition region of high-power pulsed magnetron sputtering

〇Hiroki Kobayashi¹, Naon Kamimura¹, Masato Miyata¹, Yuki Nakagawa¹, Eisuke Yokoyama^1,2, Masaomi Sanekata¹, Masahide Tona³, Hiroaki Yamamoto³, Keizo Tsukamoto³, Kiyokazu Fuke⁴, Keijiro Ohshimo⁵, Fuminori Misaizu⁶ (1.Tokyo Polytech Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-M_103-6]Monitoring of metal surface modification by reactive plasma using multi-sine impedance spectroscopy

〇Junki Morozumi¹, Koji Eriguchi¹, Keiichiro Urabe¹ (1.Kyoto university)

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-M_103-7]Raman Scattering Analysis of Iron Surface Immersed in Inductively Coupled Nitrogen/Water Vapor Plasma for Ammonia Synthesis

〇(D)Kyohei Kita¹, Yoshinobu Inagaki¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

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