[18p-M_103-1~7] 8.1 Plasma production and diagnostics

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[18p-M_103-4] Measurement of the Ion Energy Distribution at the High-Frequency Electrode
in a Dual-Frequency Capacitively Coupled Ar Plasma

〇(M1)Kodai Fujitani¹, Dohan Kim¹, Masayoshi Naito¹, Haruka Suzuki¹, Shuichi Kuboi², Hiroyuki Fukumizu², Kazuaki Kurihara², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.KIOXIA Corp.)

Keywords:

Dual-Frequency Capacitively Coupled Plasma,Ion Energy Distribution,Faraday Cup