[18p-W8E_101-1~10] 13.7 Compound and power devices, process technology and characterization

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[18p-W8E_101-1] Principles and Mechanisms of Measurement Stability in High-Voltage and Ultra-Low Current Regions— Application to Wafer-Level 1 kV-Class Mass Production Testing —

〇TAKEKI ANDO^1,2 (1.FormFactor Inc, 2.ONC Inc)

Keywords:

semiconductor,parametric test,power device

Stable measurement in high-voltage and high-current regions of power devices has remained a critical challenge for many years. In this study, measurement instability phenomena in high-voltage regions are analyzed and evaluated from an electrical standpoint, and a stable measurement methodology is established based on the underlying principles and mechanisms. The proposed approach enables stabilization of ultra-low current regions exhibiting mutually conflicting behavior under high-voltage conditions and is applicable to wafer-level mass production testing.