Electronic Components and Materials Division

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[2-43A] Thermal conductivity analysis and dielectric properties of silicon nitride 《 Physical Property, Evaluation Technology 》

*TAKESHI SHIMADA¹, Masashi FUJII¹, MICHIKO MATSUDA¹ (1. Proterial Ltd Kumagaya Works)

Keywords:

Thermal conductivity,Dielectrics,Silicon nitride